Highly Compact Micro-machined Coplanar

Magnonic crystals from protein array

We show that chemical fixation enables top-down micro-machining of large periodic 3D arrays of protein-encapsulated magnetic nanoparticles (NPs) without loss of order. We machined 3D micro-cubes containing a superlattice of NPs by means of focused ion beam etching, integrated an individual micro-cube to a thin-film coplanar waveguide and measured the resonant microwave response. Our work repres...

Compact Coplanar Waveguide Metamaterial-Inspired Lines and Its Use in Highly Selective and Tunable Bandpass Filters

A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel an...

Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration ...

Design and Simulation of a Piezoelectric Ultrasonic Micro Motor

Micro machined motors are a recent development in the domain of electrical machines. As compared to conventional electromagnetic motors, micro machined motors offer higher torque at lower speeds, and are they are compact in size. This paper focusses on the study of a piezoelectric ultrasonic micro motor that is based on inverse piezoelectric effect. Here, the stator with segmented piezoelectric...